Academic Staff and Fellows
- FUJITA Takashi
- Associate Professor Dr. Eng.
Graduate school/Mechanical Engineering
We are conducting research on ultra-fine grooving, cutting and chemical mechanical polishing technologies for a wide range of materials used in medical and chemical devices and semiconductors and electronic components. We aim to establish practical microfabrication and measurement technology using the principles of nature.
PCD cutting blade, Flexible fiber conditioner for CMP
|Research Area||Micro-machining technology, Precision measurement engineering, Semiconductor fabrication process|
|Teaching (Undergraduate Course)||Precision machining, Mechanical manufacturing method, Descriptive geometry and mechanical drawing, Basic seminar 1, Mechanical machining training 1, Basic mechanical drawing exercise|
|Research Interests||・ Research on micro-grooving technology
・ PCD blade discharge dressing technology
・ Pad conditioning technology using flexible fiber
・ End point detection technology using eddy currents by skin effect
・ Study of polishing mechanism by pad surface analysis
・ Ultra-fine Grooving of Cemented Carbide with High Aspect Ratio by PCD Blade, T. Fujita, Y. Izumi, J. Watanabe, Precision Engineering 55 (2019), 381-389
・ Verification of Operation Principle on End Point Detection by Skin Effect in Chemical Mechanical Planarization, Takashi Fujita and Keita Kitade, ECS Journal of Solid State Science and Technology , 4 (11) P5008-5015 (2017)
・ Pressure Distribution Control on Surface Conformable Polishing in Chemical Mechanical Planarization, Takashi Fujita and Junji Watanabe, ECS Journal of Solid State Science and Technology ,4 (11) P5008-5015 (2015)
|Research and Achievements|
|Affiliated Academic Societies||Japan Society of Mechanical Engineering
Japan Society of Precision Engineering
Japan Society of Abrasive Technology
Japan Engineering Education Association
The Electrochemical Society
|External Activity||Japan Society for Precision Engineering Review Cooperation Committee
Japan Society for Precision Engineering Kansai Branch Commercial Member
Deputy Advisor of the Japan Society of Mechanical Engineers Student Association
Japan Society of Abrasives Technology Kansai Area Steering Committee
|Title of Thesis, Institute, Date||Research on Planarization Polishing Technology for Multilayer Interconnection for Semiconductor Devices, Kumamoto University, March 2004|
|Biography||Sumitomo Metal Industries (currently Nippon Steel) Co., Ltd.
Tokyo Seimitsu Co., Ltd.
|Awards||Paper Award, Japan Society of Abrasive Technology
Kumagaya Award, Japan Society of Abrasive Technology
Invention Encouragement Award, Japan Invention Association
Numata Memorial Paper Award, Japan Society of Precision Engineering
Paper Award, Machine Tool Technology Promotion Foundation
|Message to Students||Open up your road based on your own engineering while observing the times and trends in the world.|
|Books Recommended to Students||Let's give you "world map of knowledge" to fight in this society. Professor Akira Ikegami's lecture at Tokyo Institute of Technology (Bungeishunjusha)|
|Interests and Others||Trekking, Running|
Advanced machining system Lab.
|Office Location||Building No. 38 N602|